Co-creating next-generation quantum and supercomputing technology since 2013

Process integration for high performance devices in a production fab

  • SC wiring
  • Josephson Junctions (JJ)
  • Stacked vias
  • 10+ metal layers
  • Superconducting interposers

Technology as a Service: A service model designed to accelerate big ideas

SkyWater is a global leader in the semiconductor implementation of superconducting technologies. Given the non-linear, highly iterative nature of technology development in this space, finding a development partner who happily experiments in a controlled production environment is critical to success.

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Advanced process development and volume production

Process Integration Capabilities

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Nb wiring depositionEndura
Resistor deposition (W)Endura
JJ formation
(Nb dep, pure Al dep, oxidation, Nb dep, all in-situ)
SiN low-temp depositionEndura
Nb & W-resistor metal etchLAM 9600
Oxide etch, stop on NbAMAT MXP
Nb damascene CMPWestech 472
Oxide CMPWestech 472
TEOS low-temp depositionNovellus C2 Sequel
HDP SiH4 oxide low-temp depositionNovellus Speed
Post metal etch solvent cleansSemitool
Resist ashGasonics A3000
Resist ash & polymer removalIridia
Lithography down to 55 nm with field stitching up to 6″x6″ASML


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